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X-ray fluorescence - ZSX Primus III+ picture

Rigaku - ZSX Primus III+

Elemental analysis of solids, liquids, powders, alloys and thin films.

Rigaku ZSX Primus III+ delivers rapid quantitative determination of major and minor atomic elements, from oxygen (O) through uranium (U), in a wide variety of sample types — with minimal standards.

Tube above optics for superior reliability
ZSX Primus III+ features an innovative optics-above configuration. Never again worry about a contaminated beam path or down time due to sample chamber maintenance. The optics-above geometry eliminates cleaning worries and increases up time.

High precision sample positioning
The high precision positioning of the sample ensures that the distance between the sample surface and X-ray tube is kept constant. This is important for applications that require high precision, such as the analysis of alloys. ZSX Primus III+ performs high-precision analysis using a unique optical configuration designed to minimize errors caused by non-flat surfaces in samples such as fused beads and pressed pellets.


  • Analysis of elements from O to U
  • Tube above optics minimizes contamination issues
  • Small footprint uses less valuable lab space
  • High precision sample positioning
  • Special optics reduce errors caused by curved sample surfaces
  • Software tools for statistical process control (SPC)
  • Evacuation and vacuum leak rates can be optimized for throughput